JPH0417872U - - Google Patents
Info
- Publication number
- JPH0417872U JPH0417872U JP5704190U JP5704190U JPH0417872U JP H0417872 U JPH0417872 U JP H0417872U JP 5704190 U JP5704190 U JP 5704190U JP 5704190 U JP5704190 U JP 5704190U JP H0417872 U JPH0417872 U JP H0417872U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- rotary coating
- coating jig
- jig
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 3
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5704190U JPH0417872U (en]) | 1990-05-30 | 1990-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5704190U JPH0417872U (en]) | 1990-05-30 | 1990-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0417872U true JPH0417872U (en]) | 1992-02-14 |
Family
ID=31581398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5704190U Pending JPH0417872U (en]) | 1990-05-30 | 1990-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417872U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273541A (ja) * | 2006-03-30 | 2007-10-18 | Topcon Corp | ウェハ保持装置 |
-
1990
- 1990-05-30 JP JP5704190U patent/JPH0417872U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273541A (ja) * | 2006-03-30 | 2007-10-18 | Topcon Corp | ウェハ保持装置 |